The AVS 69th International Symposium and Exhibition will be focusing on emerging topics related to materials, processing & interfaces with associated cutting-edge issues in both the research and manufacturing communities. The theme of the Symposium “Two is Better than One: Breaking Barriers with Coupled Phenomena” reflects recent and emerging interest throughout AVS in engineering materials and devices with novel, multifaceted functionality in small or complex form factors.
Oxford Instruments Plasma Technology team is looking forward to welcoming you to Portland to discuss your current projects and workflows. If you would like to book a meeting with us during the event, please complete the form below. During the AVS 69 Symposium, our presenter, Dr Russ Renzas will deliver a talk on the below subject.
Location
Portland, Oregon | US
Date
5 - 10 November 2023
Booth Number
409
Business
Plasma Technology
Dr Russ Renzas
Talk Title: High-quality and High Deposition Rate Atomic Layer Deposition of NbN and TiN for Superconducting Quantum Applications
Presentation Time: 8:40 AM - 9:00 AM, Monday, November 6, 2023 (room B110-112)
Due to the potential of excellent control, atomic layer deposition (ALD) is seen as very promising for quantum devices where interface and material quality and their uniformities are a big challenge. This contribution will share our recent development of high-quality superconducting NbN and TiN for quantum applications, such as resonators and interconnects. Our new remote plasma system is optimized for ALD and allows for deposition rates which are > 3x faster than conventional substrate-biased plasma ALD deposition of similar materials.
Dr Russ Renzas is the Quantum Technology Manager at Oxford Instruments Plasma Technology. Prior to joining Oxford Instruments, he was Director of Device Fabrication at a superconducting quantum computing company, Rigetti Computing. Dr. Renzas has over 15 years of experience in science with over 3,500 academic citations and two patents. He is based in Reno, Nevada.
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