The EUROCVD/Baltic ALD conference will be held in Leuven, Belgium on the 29th of May and the 2nd of June 2023. The event addresses all professionals active in the area of chemical vapor deposition techniques from the academic world, R&D institutes, and industry.
The talk will be given by Silke Peeters who will be presenting work done on an Oxford Instruments Plasma Technology FlexAL atomic layer deposition (ALD) system at 1:30 pm - 3:00 pm, on the 30th of May 2023 (location: Auditorium 2) in collaboration with the University of Glasgow and Oxford Instruments Plasma Technology.
Talk Title: Superconducting ultrathin TaCxN1-x films for quantum applications enabled by plasma-enhanced ALD with ion-energy control
Silke Peeters is a PhD candidate at the Department of Applied Physics and Science Education at the Eindhoven University of Technology representing a Plasma & Materials Processing Group.
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